Silane and trichlorosilane are key components in the solar cell and semiconductor industry. Wasson-ECE developed a series of orbitally welded sampling systems and gas chromatographs to safely handle and analyze silane and trichlorosilanes.
A major semiconductor manufacturer required analysis of high-purity silane (SiH₄) and trichlorosilane (SiHCl₃) feedstocks with parts-per-billion impurity detection. The challenge involved safely handling pyrophoric gases and other highly toxic compounds, while achieving the analytical precision demanded by the customer. Traditional analytical approaches posed unacceptable safety risks from these compounds that react violently with standard lab materials.
We have a dedicated lab to work with these toxic and pyrophoric samples. We have implemented unique production techniques including electrolytic tubing cutting, inductive brazing, and orbital welding to meet the needs of this market segment. Wasson-ECE is one of the few companies capable of safely analyzing semiconductor gases including silane, chlorosilanes, diborane, arsine, and phosphine, combining specialized safety engineering with advanced GC technology to serve the critical quality control needs of the semiconductor industry.
Wasson-ECE Instrumentation
101 Rome Ct., Fort Collins, Colorado USA 80524
Phone: +1 (970) 221-9179
Fax: +1 (970) 221-9364
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