Methylchlorosilanes and Hydrocarbons in Silicon Tetrachloride and Silicon Trichloride

Analyzer Description

Configuration:

5-valve, 3-capillary columns, MSD, cryogenic cooling, in-line sample filters

Sample Type:

Silicon tetrachloride, silicon trichloride

Compounds Separated:

Methyldichlorosilane, methyltrichlorosilane, dimethyldichlorosilane, isobutane, n-butane, propane, isopentane, n-pentane

Lower Detection Limits:

50 ppm

Methods Met:

Wasson-ECE W3765

Typical Chromatogram

MSD Chromatogram

Key Features and Benefits

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