Silanes Analysis
Analyzer Description
Configuration:
Multi-GC
**Quantity of gas chromatographs and configurations will vary depending on compounds of interest and required detection limits.**
Sample type:
High purity silane, silane gas
Compounds Separated:
Helium, hydrogen, argon, oxygen, nitrogen, carbon dioxide, carbon monoxide
Phosphine, arsine, silane, disilane, disiloxane, monochlorosilane (MCS), dichlorosilane (DCS), trichlorosilane (TCS), silicon tetrachloride (STC)
Methane, ethane, propane, isobutane, n-butane
Lower detection limits:
1 ppm for hydrogen and helium
50 ppb for MCS, DCS, TCS, STC
150 ppb for disiloxane
25 ppb for all remaining components
Methods met:
W3117-W3119, W3187
Typical Chromatogram
Key Features and Benefits
- Internally purged diaphragm valves ensure no air contamination and the lowest detection limits possible.
- Ultra-high purity fittings and regulators.
- Contains specially passivated tubing and weldments.
- Can be configured with a Wasson-ECE custom automated sampling system to maintain sample integrity and reduce dangerous accidental venting.
Corporate Headquarters
Wasson-ECE Instrumentation
101 Rome Ct., Fort Collins, Colorado USA 80524
Phone: +1 (970) 221-9179
Fax: +1 (970) 221-9364
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When you can't afford to be wrong. TM